SH-PG Series Heater

The SH-PG series heater adopts a PBN/PG/PBN sandwich structure, in which pyrolytic graphite PG is the heating layer and pyrolytic boron nitride PBN is the protection and insulation layer. The PG heating layer is chemically stable, corrosion-resistant, and has good thermal shock resistance. It can quickly increase and decrease temperature without heating deformation or film shedding. The heating zone uses high-purity tantalum, molybdenum and ultra-high purity PG/PBN and other materials. The outgassing volume is small at high temperature and will not bring additional pollution to the chamber. It is particularly suitable for ultra-high vacuum environment. The substrate rotation adopts a unique high-temperature resistant magnetic coupling rotation drive structure. The magnet does not need to be removed during the baking process, which can ensure the continuous and reliable rotation of the substrate at the growth temperature without maintenance. The specially designed PG heating layer distribution realizes uniform heating of the substrate surface.