HT series high temperature sources can provide high temperatures of 1700~2000℃ to heat solid materials to reach the evaporation temperature of refractory metals such as Sc, Ti, etc. The heating zone usually uses high temperature resistant and low vapor pressure materials, such as tantalum and tungsten, to ensure that there will be no impurity contamination at high temperatures. The use of self-supporting heating wires can avoid the use of insulating materials in high temperature areas. Insulating ceramic materials such as PBN are strictly limited to use in low temperature areas to prevent high temperature decomposition and gasification of materials. In addition, the crucible can be made of high temperature resistant metal or ceramic materials. It is recommended to select the appropriate crucible material according to the target evaporation material. For materials with higher reaction activity, a composite metal crucible with a ceramic lining is usually used.
● Ultra-high vacuum compatible | ● Working temperature range: 500℃-2000℃ | ● Self-supporting heating wire |
● Low-cost solution compared to electron beam evaporation source |
Evaporation source model | HT26 | |
Crucible volume (cc) | 26 | |
Mounting flange size | CF63 (excluding water cooling in cracking zone) | |
Length in vacuum (mm) | 336.5 | |
Vacuum inner and outer diameter (mm) | 50.8 | |
Crucible size (mm) | diameter | 25.4 |
high | 76.2 | |
Crucible material | PBN | |
Crucible shape | bottle crucible | |
Heating method | Spiral wire radiant heating | |
Thermocouple | Type C/W-Re 5%-26% | |
temperature stability | ≤±0.5℃ | |
working temperature | 300-1350℃ | |
Maximum degassing temperature | 2000℃ | |
Baking temperature | 250℃ | |
Order Code | 3100190068 |
For information on compatibility of HT high temperature sources with Riber or Veeco MBE systems, please contact Femian Instruments
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