SH-Ta Series Heater

The ultra-high vacuum compatible SH-Ta series heater uses specially wound high-purity tantalum wire for radiation heating. It can be installed vertically in the molecular beam epitaxy system and is very suitable for growing various compound semiconductor materials. The sample stage allows the loading of 4, 6, and 8-inch substrate trays, and different models of SH-Ta series heaters can be selected according to the MBE system. The heating zone uses high-purity tantalum, molybdenum and PBN materials to minimize material outgassing and particle generation under high temperature conditions. The substrate rotation adopts a unique high-temperature resistant magnetic coupling rotation drive structure. The magnet does not need to be removed during the baking process, which can ensure that the substrate rotates continuously for a long time at the growth temperature without maintenance. The specially designed heating wire distribution can achieve uniform heating of the substrate surface.