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DP Series Doping Sources

DP series doping sources are usually suitable for materials such as Si, Be, GaTe, etc., and can achieve stable control and uniform and precise doping of relatively small beams in MBE systems. The compact structure and small thermal mass of the DP doping source make its beam response fast, high repeatability, good stability, and can obtain a good doping curve. The conical crucible helps to achieve high concentration doping with a small amount of source material and low temperature, and ensure doping uniformity.


Features
●  Ultra-high vacuum compatible●  The unique heating wire design inside ensures that the crucible is heated evenly●  Multi-layer line contact thermal insulation tantalum cylinder greatly reduces heat radiation loss
●  Temperature stability is better than ±0.2℃●  Equipped with independent water cooling jacket, evaporation source and water cooling jacket can be removed separately


Technical Parameters

Evaporation source model
DP22DP25DP65DP220
Crucible volume (cc)twenty two2565220
Mounting flange sizeCF35CF63CF100CF150
Total length (mm)410472.2533.5592
Length in vacuum (mm)282.6325.2380460
Vacuum inner and outer diameter (mm)33.351.877.8103

Crucible size

(mm)

Mouth outer diameter32.85177102
Mouth inner diameter19.93452.374.5
high89.754.269105
Crucible materialPBN
Crucible shapeConical crucible
Heating methodRadiant heating, PBN supported tantalum sheet
ThermocoupleType C/W-Re 5%-26%
temperature stability≤±0.2℃
working temperature300-1350℃
Maximum degassing temperature1350℃
Baking temperature250℃
order code3205010068320501005432050100303205010169

DP doping source with Riber or Veeco Please contact Femian Instruments for MBE system compatibility information


Test Data

资源 3@4x.png

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