DP series doping sources are usually suitable for materials such as Si, Be, GaTe, etc., and can achieve stable control and uniform and precise doping of relatively small beams in MBE systems. The compact structure and small thermal mass of the DP doping source make its beam response fast, high repeatability, good stability, and can obtain a good doping curve. The conical crucible helps to achieve high concentration doping with a small amount of source material and low temperature, and ensure doping uniformity.
● Ultra-high vacuum compatible | ● The unique heating wire design inside ensures that the crucible is heated evenly | ● Multi-layer line contact thermal insulation tantalum cylinder greatly reduces heat radiation loss |
● Temperature stability is better than ±0.2℃ | ● Equipped with independent water cooling jacket, evaporation source and water cooling jacket can be removed separately |
Evaporation source model | DP22 | DP25 | DP65 | DP220 | |
Crucible volume (cc) | twenty two | 25 | 65 | 220 | |
Mounting flange size | CF35 | CF63 | CF100 | CF150 | |
Total length (mm) | 410 | 472.2 | 533.5 | 592 | |
Length in vacuum (mm) | 282.6 | 325.2 | 380 | 460 | |
Vacuum inner and outer diameter (mm) | 33.3 | 51.8 | 77.8 | 103 | |
Crucible size (mm) | Mouth outer diameter | 32.8 | 51 | 77 | 102 |
Mouth inner diameter | 19.9 | 34 | 52.3 | 74.5 | |
high | 89.7 | 54.2 | 69 | 105 | |
Crucible material | PBN | ||||
Crucible shape | Conical crucible | ||||
Heating method | Radiant heating, PBN supported tantalum sheet | ||||
Thermocouple | Type C/W-Re 5%-26% | ||||
temperature stability | ≤±0.2℃ | ||||
working temperature | 300-1350℃ | ||||
Maximum degassing temperature | 1350℃ | ||||
Baking temperature | 250℃ | ||||
order code | 3205010068 | 3205010054 | 3205010030 | 3205010169 |
DP doping source with Riber or Veeco Please contact Femian Instruments for MBE system compatibility information
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