The evaporation source shutter uses a stepper motor to drive the flexible corrugated tube for stretching and compression, driving the shutter shutter shutter to move up or down, thereby achieving complete opening or closing of the beam. Motor soft control can reduce the degree of baffle vibration, avoid material dropping and particle generation. Different material systems can be customized for baffles and support rods. The closed position of the shutter shutter should be as far away as possible from the mouth of the evaporation source to minimize the transient size of the beam when the shutter is opened, but the shutter size should be large enough to ensure complete obstruction of the beam.
| ● Completely block the beam when closed | ● Simple mechanical structure | ● No dust generation |
| ● Can reduce beam transients | ● Reliable performance with a switch life of over 1 million cycles |
| Mounting flange | CF63 | CF100 | VAC7000 | CF150 | CF200 | |
| Applicable system | MBE600 | MBE800 | MBE800P | MBE1000 | MBE2000 | |
| Material of blocking plate | High-purity tantalum | |||||
| Drive mode | Stepping motor | |||||
| Switching Speed | ＜1000ms | |||||
| Synchronization of switches | ＜25ms | |||||
| Order code | 3205010033 | 3205010173 | 3205010175 | 3205010176 | 3205010177 | |
After receiving the information, our sales personnel/product engineers will contact you
Some products can be customized according to your needs
Your information will be kept confidential throughout the entire process
中文
021-6525 3206
Your current location: 
National Service Hotline
