VAC series valve type cracking source

The VAC series valved cracking source is specially designed for As material evaporation. Solid As is heated in a large-capacity crucible to produce an As₄ beam, which is then passed through a high-temperature cracking zone to form highly reactive As₂ small atomic clusters, which can effectively improve material utilization efficiency and reduce material waste. The valve of the cracking source can achieve precise control of transient changes and complete closure of the beam. In addition, the valve has its own torque feedback, which can achieve fully automatic zero calibration. The VAC cracking source can be idle at normal operating temperature with the valve closed, without consuming the source material in the crucible. The uniquely designed diffuser structure can control the beam distribution state and improve the beam uniformity. It is strongly recommended to use three independent power supplies to form a stable temperature gradient to avoid material deposition and blockage near the valve.