VCC series corrosive cracking source

VCC series corrosive cracking sources are usually suitable for evaporation of corrosive materials such as Sb, Te, Mg, and CdTe. Solid materials are heated in a large-capacity crucible to generate a beam, and after passing through the high-temperature cracking zone, a small molecule beam with high reaction activity is formed, which can effectively improve the material utilization efficiency and reduce material waste. The cracking source adopts a specially designed full pyrolytic boron nitride (PBN) crucible and valve structure, which can effectively avoid material corrosion in the source furnace. The PBN valve can accurately control the beam switch, provide fast and stable beam, and have good beam repeatability. In addition, the valve is easy to disassemble and can be easily loaded through the conduction zone. The uniquely designed diffuser plate structure can control the beam distribution state and improve the beam uniformity.