HL series evaporation sources are usually suitable for materials such as Ga and In. They adopt a bottle-shaped crucible and a double heating wire structure design. The upper and lower temperature zones are independently controlled to achieve a positive temperature gradient, avoid condensation of materials at the mouth of the crucible, and thus reduce the density of elliptical defects. With its unique crucible shape, the HL series evaporation source can significantly increase the loading volume, extend the average material evaporation time, and greatly reduce the degree of beam change at the moment of opening and closing the shutter. In addition, the bottle-shaped crucible helps to form a constant liquid surface, which can provide excellent uniformity, long-term stable beam intensity and good beam repeatability. According to the amount of material in the crucible, adjust the temperature gradient of the upper and lower temperature zones to optimize the beam uniformity.
● Ultra-high vacuum compatible | ● Two sets of heating wires are individually temperature controlled to achieve a "hot lip" configuration | ● Bottle-shaped crucible is used, which has excellent beam uniformity and long-term stability |
● Temperature stability is better than ±0.2℃ | ● Equipped with independent water cooling jacket, evaporation source and water cooling can be removed separately |
Evaporation source model | HL110 | HL175 | HL1100 | HL2350 | |
Crucible volume (cc) | 110 | 175 | 1100 | 2350 | |
Mounting flange size | CF63 | CF63 | CF125 | CF200 | |
Total length (mm) | 399 | 460.5 | 602.3 | 653.3 | |
Length in vacuum (mm) | 260.3 | 321.8 | 447 | 513.3 | |
Vacuum inner and outer diameter (mm) | 55.3 | 55.3 | 100.2 | 164 | |
Crucible size (mm) | diameter | 15.1 | 15.1 | 31.4 | 38.1 |
high | 119.5 | 181 | 314.4 | 403.7 | |
Crucible material | PBN | ||||
Crucible shape | bottle crucible | ||||
Heating method | Radiant heating, PBN supported tantalum sheet | ||||
Thermocouple | Type C/W-Re 5%-26% | ||||
temperature stability | ≤±0.2℃ | ||||
working temperature | 300-1350℃ | ||||
Maximum degassing temperature | The upper temperature zone is 1300℃, the lower temperature zone is 1350℃ | ||||
Baking temperature | 250℃ | ||||
order code | 3205010064 | 3205010052 | 3205010041 | 3205010170 |
HL evaporation source Please contact Fermian Instruments for information on compatibility with Riber or Veeco MBE systems
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