中文 021-6525 3206

Your current location: Home > Products > Industrial MBE > Accessories/Parts > HL Series Evapo...

HL Series Evaporation Source

HL series evaporation sources are usually suitable for materials such as Ga and In. They adopt a bottle-shaped crucible and a double heating wire structure design. The upper and lower temperature zones are independently controlled to achieve a positive temperature gradient, avoid condensation of materials at the mouth of the crucible, and thus reduce the density of elliptical defects. With its unique crucible shape, the HL series evaporation source can significantly increase the loading volume, extend the average material evaporation time, and greatly reduce the degree of beam change at the moment of opening and closing the shutter. In addition, the bottle-shaped crucible helps to form a constant liquid surface, which can provide excellent uniformity, long-term stable beam intensity and good beam repeatability. According to the amount of material in the crucible, adjust the temperature gradient of the upper and lower temperature zones to optimize the beam uniformity.


Features
●  Ultra-high vacuum compatible●  Two sets of heating wires are individually temperature controlled to achieve a "hot lip" configurationBottle-shaped crucible is used, which has excellent beam uniformity and long-term stability
●  Temperature stability is better than ±0.2℃●  Equipped with independent water cooling jacket, evaporation source and water cooling can be removed separately


Technical Parameters

Evaporation source model
HL110HL175HL1100HL2350
Crucible volume (cc)11017511002350
Mounting flange sizeCF63CF63CF125CF200
Total length (mm)399460.5602.3653.3
Length in vacuum (mm)260.3321.8447513.3
Vacuum inner and outer diameter (mm)55.355.3100.2164

Crucible size

(mm)

diameter15.115.131.438.1
high119.5181314.4403.7
Crucible materialPBN
Crucible shapebottle crucible
Heating methodRadiant heating, PBN supported tantalum sheet
ThermocoupleType C/W-Re 5%-26%
temperature stability≤±0.2℃
working temperature300-1350℃
Maximum degassing temperatureThe upper temperature zone is 1300℃, the lower temperature zone is 1350℃
Baking temperature250℃
order code3205010064320501005232050100413205010170

HL evaporation source Please contact Fermian Instruments for information on compatibility with Riber or Veeco MBE systems


Test Data

资源 5@4x.png

Contact Us

After receiving the information, our sales personnel/product engineers will contact you

Some products can be customized according to your needs

Your information will be kept confidential throughout the entire process

Related Products
TOP