The CL series evaporation source is specially designed for Al material evaporation. It adopts a bottle-shaped crucible and a double heating wire structure design. The upper and lower temperature zones are independently controlled to achieve a negative temperature gradient, thereby effectively preventing Al from infiltrating the PBN crucible and causing material overflow. With its unique crucible shape, the CL series evaporation source can significantly increase the loading volume, extend the material evaporation time, and greatly reduce the degree of beam change at the moment of opening and closing the shutter. In addition, the bottle-shaped crucible helps to form a constant liquid surface, which can provide excellent uniformity, long-term stable beam intensity and good beam repeatability. According to the amount of material in the crucible, adjust the temperature gradient of the upper and lower temperature zones to optimize the beam uniformity.
● Ultra-high vacuum compatible | ● Two sets of heating wires are individually temperature controlled to achieve a "cold lip" configuration | ● Bottle-shaped crucible is used, which has excellent beam uniformity and long-term stability |
● Temperature stability is better than ±0.2℃ | ● Equipped with independent water cooling jacket, evaporation source and water cooling can be removed separately |
Evaporation source model | CL110 | CL550 | CL1750 | |
Crucible volume (cc) | 110 | 550 | 1750 | |
Mounting flange size | CF63 | CF125 | CF200 | |
Total length (mm) | 399 | 505.3 | 619 | |
Length in vacuum (mm) | 260.25 | 350 | 479 | |
Vacuum inner and outer diameter (mm) | 55.5 | 91 | 160.6 | |
Crucible size (mm) | diameter | 15.1 | 23.5 | 50.8 |
high | 119.5 | 194.5 | 273 | |
Crucible material | PBN | |||
Crucible shape | bottle crucible | |||
Heating method | Radiant PlusThermal, PBN-supported tantalum sheets | |||
Thermocouple | Type C/W-Re 5%-26% | |||
temperature stability | ≤±0.2℃ | |||
working temperature | 300-1350℃ | |||
Maximum degassing temperature | The upper temperature zone is 1300℃, the lower temperature zone is 1350℃ | |||
Baking temperature | 250℃ | |||
order code | 3205010065 | 3205010031 | 3205010171 |
For information on compatibility of CL evaporation sources with Riber or Veeco MBE systems, please contact Fermian Instruments
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