AH series thermal cracking source

The AH series thermal cracking source is a cost-effective atomic hydrogen source that can crack high-purity hydrogen gas into highly active hydrogen atoms at high temperatures. It is commonly used for substrate cleaning, removal of oxides, promotion of atomic migration, and adjustment of gallium nitride growth rate. The heating wire in the gas transmission conduit is made of high-temperature resistant tungsten wire material, which can be heated to 1800-2200 ℃. The AH series thermal cracking source is additionally equipped with water-cooled flanges, which can significantly reduce thermal radiation and minimize material high-temperature gas release. The specially designed diffusion plate structure can control the distribution of atomic hydrogen and improve beam uniformity. In addition, the atomic hydrogen thermal cracking source can only produce hydrogen atoms and hydrogen molecules, which can effectively avoid substrate damage.