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Oxide MBE 350 mainly uses a cylindrical 316 stainless steel cavity processed by argon arc welding, with a top flange size of DN300CF. The MBE350 system can install up to 9 evaporation sources and reserve multiple flange ports, which can be combined with RHEED for real-time monitoring of film growth. The system can introduce oxidizing gases to epitaxially grow metal oxide thin films.
| ● Differential design of evaporation source, allowing deposition of oxide materials under high oxygen or ozone partial pressure | ● No need to destroy the vacuum in the growth chamber, to achieve packing and replacement of the evaporation source | ● High purity ozone generation system or radio frequency plasma source can be selected as the oxygen source |
| Oxide-MBE-350 | Module Description | Configuration parameter | |
| Growth chamber | Cavity | Material of the cavity | SS316 |
| Cavity Size | 200mm I.D | ||
| Baking temperature | Max.200℃ | ||
| Background vacuum | < 5×10-10 mbar | ||
| Pumping system | 450L/s molecular pump + 10m3/h mechanical pump | ||
| Vacuum measurement system | Ionic gauge+Pirani gauge | ||
| Liquid nitrogen cold screen | Optional | ||
| Ion pump | Optional | ||
| Sample Holder | Sample size | Flag-type Sample holder | |
| Substrate heating method | Radiant heating | ||
| Substrate heater temperature | Room temperature-1200K | ||
| Component | Steam source configuration | 6xDN40CF, 2xDN63CF | |
| Independent evaporation source baffle | Pneumatic drive | ||
| QCM | Standard configuration | ||
| RHEED | 15KeV-30KeV | ||
| Ion Source | Optional | ||
| Ozone generation module | Optional | ||
| RF plasma source | Optional | ||
Rapid injection room | Cavity | Material of the cavity | SS316 |
| Baking temperature | Max.200℃ | ||
| Background vacuum | <5×10-8 mbar | ||
| Pumping system | 80L/s Molecular pump+10m3/h Mechanical pump | ||
| Vacuum measurement system | Full range gauge | ||
| Component | Sample Parking Platform | 6 or 12 workstations | |
| System integration and control | GUIDE software | Standard configuration | |
| Baking system | Standard configuration | ||
| System bracket | Standard configuration | ||
| Vacuum lighting system | Optional | ||
| Plasma cleaning | Pump truck | ||
| CCD camera | Optional | ||
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