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The MBE-500 mainly adopts a cylindrical 316 stainless steel cavity processed by argon arc welding, with a top flange size of DN400CF and equipped with more than 10 evaporation sources. The system reserves multiple flange ports, and the installation of flanges is compatible with various in-situ measurements such as RGA, RHEED, BFM, etc. Modular design, strong multifunctionality of the equipment, instantaneous controllability of the beam baffle, and the ability to achieve high-quality 2-inch film growth.
| ● Flexible configuration of different types of evaporation sources for high-quality epitaxial growth on substrates | ● Widely applicable, compatible with III-V group, oxide, and nitride thin film growth | ● Interconnectable Cluster Sample Transfer System, achieving fully automatic transfer of 2-inch substrate trays |
| ● Equipped with an in-situ detection system to monitor growth status in real-time | ||
| MBE-500 | Module Description | Configuration parameter | |
| Growth chamber | Cavity | Material of the cavity | SS316 |
| Cavity Size | 400mm I.D | ||
| Baking temperature | Max.200℃ | ||
| Background vacuum | < 5×10-10 mbar | ||
| Pumping system | 700L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Ionic gauge+Pirani gauge | ||
| Liquid nitrogen cold screen | Optional | ||
| Ion pump | Optional | ||
| Cryopump | Optional | ||
| Sample Holder | Sample size | 2 inch | |
| Substrate heating method | Radiant heating | ||
| Substrate heater temperature | Room temperature-1200K | ||
| Electron beam heating | Optional | ||
| Dc heating | Optional | ||
| Liquid nitrogen refrigeration module | Optional | ||
| Component | Steam source configuration | 6xDN40CF, 4xDN63CF, 1xDN100CF | |
| Independent evaporation source baffle | Pneumatic drive | ||
| BFM | Standard configuration | ||
| RHEED | 15KeV-30KeV | ||
| Ion Source | Optional | ||
| RGA | Optional | ||
Rapid injection room | Cavity | Material of the cavity | SS316 |
| Baking temperature | Max.200℃ | ||
| Background vacuum | <5×10-8 mbar | ||
| Pumping system | 80L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Full range gauge | ||
| Component | Sample Parking Platform | 3 workstations | |
| System integration and control | GUIDE software | Standard configuration | |
| Baking system | Standard configuration | ||
| System bracket | Standard configuration | ||
| Pollutant recovery system | Optional | ||
| Vacuum lighting system | Optional | ||
| Plasma cleaning | Optional | ||
| Pump truck | Optional | ||
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