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The Cubic 200 adopts an integrated square 316 stainless steel cavity, which can accommodate up to 3 beam source furnaces.
The four axis sample control console can be installed horizontally or vertically, suitable for growing small-sized (matched with flag shaped sample holders) samples.
The system reserves multiple flange ports, which are very suitable for scientific research users to explore and study processes.
| ● A small, compact, and cost-effective system | ● Stainless steel cavity integrated processing and forming, no weld structure, making it easier to achieve ultra-high vacuum environment | ● Research equipment suitable for general education and a simple and intuitive understanding of molecular beam epitaxy technology |
| HMF-MBE 200 | Module Description | Configuration parameter | |
| Growth chamber | Cavity | Material of the cavity | SS316 |
| Cavity Size | 200mm I.D | ||
| Baking temperature | Max.200℃ | ||
| Background vacuum | < 5×10-10 mbar | ||
| Pumping system | 300L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Ionic gauge+Pirani gauge | ||
| Ion pump | Optional | ||
| Sample Holder | Sample size | Flag-type Sample holder | |
| Substrate heating method | Radiant heating | ||
| Substrate heater temperature | 1200K | ||
| Electron beam heating | Optional | ||
| Dc heating | Optional | ||
| Liquid nitrogen refrigeration module | Optional | ||
| Component | Steam source configuration | 3xDN40CF | |
| Independent evaporation source baffle | Pneumatic drive | ||
| QCM | Standard configuration | ||
| Ion Source | Optional | ||
| RGA | Optional | ||
| Rapid injection room | Cavity | Material of the cavity | SS316 |
| Baking temperature | Max.200℃ | ||
| Background vacuum | <5×10-8 mbar | ||
| Pumping system | 80L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Full range gauge | ||
| Component | Sample Parking Platform | 6 or 12 workstations | |
| System integration and control | GUIDE software | Standard configuration | |
| Baking system | Standard configuration | ||
| System bracket | Standard configuration | ||
| Vacuum lighting system | Optional | ||
| Plasma cleaning | Optional | ||
| CCD camera | Optional | ||
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