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The MBE-400 mainly uses a cylindrical 316 stainless steel cavity processed by argon arc welding, with a top flange size of DN350CF, and can accommodate up to 10 evaporation sources. Reserve multiple flange ports, install flanges compatible with various in-situ measurements such as RGA, RHEED, BFM, etc. The beam baffle is instantly controllable, achieving high-quality 2-inch film growth.
| ● Differential design of evaporation source, allowing deposition of oxide materials under high oxygen or ozone partial pressure | ● No need to destroy the vacuum in the growth chamber, to achieve packing and replacement of the evaporation source | ● High purity ozone generation system or radio frequency plasma source can be selected as the oxygen source |
| MBE 400 | Module Description | Configuration parameter | |
| Growth chamber | Cavity | Material of the cavity | SS316 |
| Cavity Size | 300mm I.D | ||
| Baking temperature | Max.200℃ | ||
| Background vacuum | < 5×10-10 mbar | ||
| Pumping system | 700L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Ionic gauge+Pirani gauge | ||
| Liquid nitrogen cold screen | Optional | ||
| Ion pump | Optional | ||
| Cryopump | Optional | ||
| Sample Holder | Maximum sample size | 2 inch | |
| Substrate heating method | Radiant heating | ||
| Substrate heater temperature | Room temperature-1200K | ||
| Electron beam heating | Optional | ||
| Substrate heating method | Optional | ||
| Liquid nitrogen refrigeration module | Optional | ||
| Component | Steam source configuration | 6xDN40CF, 2xDN63CF | |
| Independent evaporation source baffle | Pneumatic drive | ||
| QCM | Standard configuration | ||
| RHEED | 15KeV-30KeV | ||
| Ion Source | Optional | ||
| RGA | Optional | ||
Rapid injection room | Cavity | Material of the cavity | SS316 |
| Baking temperature | Max.200℃ | ||
| Background vacuum | <5×10-8 mbar | ||
| Pumping system | 80L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Full range gauge | ||
| Component | Sample Parking Platform | 3 workstations | |
| System integration and control | GUIDE software | Standard configuration | |
| Baking system | Standard configuration | ||
| System bracket | Standard configuration | ||
| Vacuum lighting system | Optional | ||
| Plasma cleaning | Optional | ||
| CCD Camera | Optional | ||
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