Product Overview：

The linear interconnection system and the circular sample transfer system complement each other, and both can realize the transfer of samples between different systems in an ultra-high vacuum environment, but the focus is slightly different. The circular sample transfer system is relatively compact and suitable for small laboratory-level interconnection construction; the linear interconnection system has more sample sizes and quantities for a single transfer, and is suitable for larger interconnection construction. At the same time, the circular sample transfer system and the linear sample transfer system can also be matched with each other, such as a circle with a line, a circle with a circle, or a line and then expanded. Fermion Instruments has rich design and construction experience and cases for users to refer to.

Product Overview：

Vacuum control and protection system, integrating vacuum gauge signal, molecular pump control, evaporation source protection, baking protection and other functions. Contains temperature control software for evaporation source and sample rack, baffle control software, hot air baking module, uniform baking temperature, easy disassembly and assembly.

Product Overview：

FERMI-RFPS-200 is a new high-efficiency RF plasma source produced by Fermi Instruments. Through the coil structure, it can generate plasma in a vacuum chamber. The types of exciting gases include but are not limited to H₂, N₂, O₂, rare gases, etc. It has better stability and more precise controllability. It is widely used in molecular beam epitaxy (MBE) systems for nitride growth, nitrogen atom implantation and doping, oxide growth, oxygen atom implantation and doping, hydride growth, and hydrogen atom surface cleaning.

Product Overview：

6-axis Closed Cycle Cryo-Manipulator provided by Fermion Instruments can achieve precise control of sample position and posture. It is mainly composed of four parts: cryogenic sample rod, temperature control system, XYZ-R1 translation stage, and motor control system. The entire sample holder and translation stage are made of non-magnetic materials and can be used under ultra-high vacuum. The sample stage can move over a large range in the X, Y, and Z directions, and can achieve rotational motion around three axes (rotation angle R1, pitch angle R2, in-plane rotation angle R3).

Product Overview：

Desktop shock-absorbing low-temperature optical thermostat, using GM refrigerator as cooling source, no liquid helium consumption. Multi-stage vibration isolation design makes the sample stage vibration less than 200nm. The lowest temperature of the sample stage reaches 3.6K.