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Medium temperature evaporation source | RF plasma source | Hydrogen oxygen thermal cracking source | |||||||||||||||
| IA | Cold or hot mouth | High temperature evaporation source | Dual temperature evaporation source | VIIIA | |||||||||||||
(H) | IIA | IIIA | IVA | VA | VIA | VIIA | (He) | ||||||||||
(Li) | (Be) | (B) | (C) | (N) | (O) | (F) | (Ne) | ||||||||||
(Na) | (Mg) | IIIB | IVB | VB | VIB | VIIB | VIIIB | IB | IIB | (Al) | (Si) | (P) | (S) | (Cl) | (Ar) | ||
(K) | (Ca) | (Sc) | (Ti) | (V) | (Cr) | (Mn) | (Fe) | (Co) | (Ni) | (Cu) | (Zn) | (Ga) | (Ge) | (As) | (Se) | (Br) | (Kr) |
| (Sr) | (Y) | (Zr) | (Nb) | (Mo) | (Tc) | (Ru) | (Rh) | (Pd) | (Ag) | (Cd) | (In) | (Sn) | (Sb) | (Te) | (I) | (Xe) | |
(Cs) | (Ba) | La-Lu | (Hf) | (Ta) | (W) | (Re) | (Os) | (Ir) | (Pt) | (Au) | (Hg) | (Tl) | (Pb) | (Bi) | (Po) | (At) | (Rn) |
| La-Lu | (La) | (Ce) | (Pr) | (Nd) | (Pm) | (Sm) | (Eu) | (Gd) | (Tb) | (Dy) | (Ho) | (Er) | (Tm) | (Yb) | (Lu) | ||
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