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The high-precision full-size 3D translation stage can achieve smooth motion of equipment in the X, Y, and Z directions in ultra-high vacuum environments, with extremely high motion accuracy. The platform adopts a linear guide structure and high-precision ball screw, which is stable and reliable in structure. All control methods are servo motors+grating rulers, which can achieve sub micron precision and fully closed-loop control, high precision, high load, and adjustable motion flange angle (± 3 °).
| ● Pressure Range：1bar~10-11mbar | ● Partial corrugated pipe can be baked at 150 ℃ | ● Welded corrugated pipe material:SS316L |
| ● Orifice：102mm | ● Upper end installation flange:CF100 flange, through-hole | ● Bottom installation flange: CF150 flange,Through-hole |
| ● XYZ axis resolution: 0.2μm | ● Servo motor drive | ● Acceptable customization |
| ● Grating ruler closed-loop feedback |
| Product Name | High precision full-size 3D translation stage（HFXYZ） | ||
| Upper moving flange | CF100 | ||
| Flange size | mm | 152 | |
| Inch | 6.0 | ||
| Bottom installation flange | CF150 | ||
| Flange size | mm | 203 | |
| Inch | 8.0 | ||
| XY itinerary (mm) | ±12.5 | ||
| Z itinerary (mm) | 300 | 550 | |
| A stretch (mm) | 710 | 960 | |
| B compression (mm) | 410 | 410 | |
| C (mm) | 815 | 1065 | |
| Z drive | Servo motor | ||
| XY drive | Servo motor | ||
| Model | HFXYZ150Z300M-1055 | HFXYZ150Z550M-1055 | |
| Order code | 3042320009 | 3042320019 | |
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