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The medium-sized 3D translation stage can achieve the movement of the vacuum inner part of the component in the XYZ axis direction. The X/Y direction adopts a cross roller motion structure, which is stable and reliable. The driving method can be selected from stepper motors or micro split heads. The Z-direction adopts a motion structure combining optical axis and ball screw, which moves smoothly and has self-locking function. The driving method is a stepper motor+handwheel.
| ● Pressure Range: 1bar~10-11mbar | ● Baking temperature:150℃ (Remove the motor and its components) | ● Welded corrugated pipe material:SS316L |
| ● Orifice: 65mm | ● Upper end installation flange:CF63 flange, through-hole | ● Bottom installation flange:CF100 flange, threaded hole |
| ● X/Y drive: Stepper motor (resolution ≤1μm, accuracy ≤10μm) or micro splitter (resolution 10μm) | ● Z drive:Stepper motor (resolution ≤1μm, accuracy ≤10μm)+handwheel | ● Acceptable customization |
| Product Name | Medium sized 3D translation platform（MXYZ） | ||||
| Upper moving flange | CF63 | ||||
| Flange size | mm | 114 | |||
| Inch | 4.5 | ||||
| Bottom installation flange | CF100 | ||||
| Flange size | mm | 152 | |||
| Inch | 6.0 | ||||
| XY itinerary (mm) | ±7.5 | ||||
| Z itinerary (mm) | 100 | 200 | |||
| A stretch (mm) | 399 | 499 | |||
| B compression (mm) | 299 | 299 | |||
| C (mm) | 463 | 563 | |||
| Z drive | Stepper motor+handwheel | Stepper motor+handwheel | |||
| XY drive | Micrometer Heads | Stepping motor | Micrometer Heads | Stepping motor | |
| Model | MXYZ100Z100S-0108 | MXYZ100Z100S-0128 | MXYZ100Z200S-0108 | MXYZ100Z200S-0128 | |
| Order code | 3042200008 | 3042200012 | 3042200032 | 3042200036 | |
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