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The compact 3D translation stage can achieve the movement of the vacuum inner part of the component in the XYZ axis direction. The XY direction is driven by a differential head, while the Z direction is driven by a handwheel and has self-locking function. Stable structure, high precision, and compact size.
| ● Pressure Range: 1bar~10-11mbar | ● Driving mode: Hand movement | ● Maximum baking temperature: 150℃ |
| ● Welded corrugated pipe material: SS316L | ● Differential head resolution: 10μm | ● The Z-axis scale increases by 1mm |
| ● Install flange at the upper end: CF35,threaded hole | ● Bottom installation flange: CF63,through-hole | ● Acceptable customization |
| Product Name | Compact 3D translation stage（SXYZ） | |||
| Upper moving flange | CF35 | |||
| Flange size | mm | 70 | ||
| Inch | 2.75 | |||
| Bottom installation flange | CF63 | |||
| Flange size | mm | 114 | ||
| Inch | 4.5 | |||
| XYZ driver | Hand movement | |||
| XY itinerary (mm) | ±12.5 | |||
| Z itinerary (mm) | 75 | 100 | 150 | |
| A stretch (mm) | 240 | 265 | 315 | |
| B compression (mm) | 165 | 165 | 165 | |
| C (mm) | 255 | 280 | 330 | |
| Weight(kg) | 10.2 | 10.5 | 10.9 | |
| Model | SXYZ63Z75 | SXYZ63Z100 | SXYZ63Z150 | |
| Order code | 3042100001 | 3042100002 | 3042100003 | |
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