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The full-size 3D translation stage can achieve the movement of the vacuum inner part of the component in the XYZ axis direction. The X/Y direction adopts a cross roller and ball screw structure, and the driving method is a stepper motor+handwheel. The Z-direction adopts a motion structure combining optical axis and ball screw, and has self-locking function. The driving method is a stepper motor. Stable structure, high load capacity, and high precision.
| ● Pressure Range: 1bar~10-11mbar | ● Baking temperature:150℃ (Remove the motor and its components) | ● Welded corrugated pipe material:SS316L |
| ● Orifice: 102mm | ● Upper end installation flange: CF100 flange, through-hole | ● Bottom installation flange: CF150 flange, threaded hole |
| ● X/Y drive: Stepper motor (resolution ≤1μm, accuracy ≤10μm)+handwheel | ● Z drive:Stepper motor (resolution ≤1μm, accuracy ≤10μm) | ● Acceptable customization |
| Product Name | Full-size 3D translation platform（CFXYZ） | |||
| Upper moving flange | CF100 | |||
| Flange size | mm | 152 | ||
| Inch | 6.0 | |||
| Bottom installation flange | CF150 | |||
| Flange size | mm | 203 | ||
| Inch | 8.0 | |||
| XY itinerary (mm) | ±12.5 | |||
| Z itinerary (mm) | 200 | 350 | 500 | |
| A stretch (mm) | 508 | 658 | 808 | |
| B compression (mm) | 308 | 308 | 308 | |
| C (mm) | 565 | 715 | 865 | |
| Z drive | Stepping motor | |||
| XY drive | Handwheel+stepper motor | |||
| Model | CFXYZ150Z200M-1083 | CFXYZ150Z350M-1083 | CFXYZ150Z500M-1083 | |
| Order code | 3042310009 | 3042310017 | 3042310025 | |
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