Fermion Instruments has specially designed and developed a circular sample transfer system for sample transfer in ultra-high vacuum complex systems. The chamber is made of ultra-high vacuum compatible material SS316, shaped like a UFO, and the side connector can be connected to different subsystems, so that the sample can be freely switched back and forth in a vacuum environment and measured in situ.
The end of the sample transfer system mechanism can achieve long-distance telescopic movement (invention patent number: ZL 2015 1 0661875.0), and the end of the robotic arm is equipped with a sample grabber for sample grabbing. Its structure is simple and efficient, which reduces costs and simplifies operation. At the same time, the design focuses on the compatibility of different ultra-high vacuum experimental systems, expanding the scope of application. There are already rich docking cases, such as MBE, APRES, STM, etc.
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RDC820 | RDC520 | |
Cavity inner diameter | 700mm | 550mm |
Robotic arm mounting flange | CF200 | CF200 |
Observation port flange | CF150 | CF100 |
Docking flange | CF100 | CF100 |
Robot arm rotation | 360° continuous rotation | 360° continuous rotation |
Robot arm extension distance (extension method Lankou) | 820mm | 520mm |
Expandability | Maximum Connect 8 subsystems | Up to 6 subsystems can be connected |
Rotation repeatability | <0.1° | <0.1° |
Linear expansion and contraction repeatability | <1mm | <1mm |
Maximum baking temperature | 120℃ | 120℃ |
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