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E-Beam Evaporators pushed the highest working temperature to around 3000 ℃ by electron bombardment from the surrounding filament to a rod form material or crucibles.
The heated zone is enclosed in a water-cooled copper shroud which keeps the degassing at a very low level. A 50mm travel linear translator is equipped with the evaporator to support the movement of rod material and guarantee the rod tip always in the optimized position.
| ● High voltage up to 2kV, emission current up to 200mA | ● Programmable emission current |
| ● Built-in water cooling and shutter | ● Vacuum length can be customized |
E-Beam | Module description | Configuration parameter |
| Model | E38EB | |
| Size | Mounting flange | DN38CF |
| In vacuum length | 240mm | |
| In vacuum outer diameter | 36mm | |
| Work distance | 80-160mm | |
| Crucible | Rod size | 2.5mm(diameter),60mm(length) |
| Crucible capacity | 0.25cc | |
| Crucible material | W, Ta | |
| Temperature | Filament Current | 4.5A (Max. 5A) |
| Maximum High voltage | 2kV | |
| Maximum Emission current | 200mA | |
| Deposition rates stability | ≤0.05Å/s | |
| Maximum baking temperature | 250℃ |
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Fe Flux Test | Fe Flux Stibility Test |
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Fe Film Thickness Test | lon Current vs Flux Test |
After receiving the information, our sales personnel/product engineers will contact you
Some products can be customized according to your needs
Your information will be kept confidential throughout the entire process
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