2-axis MASK Manipulator

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产品亮点 Highlights

● Heating filament: SIC

● Highest temperature: 1200K

● Multi-axis: Z、R1

● Temperature stability: 0.1K with PID control

● MASK compatible

● Re-orientation accuracy: 2 μm

● Rotation angle: 0°，90°180°，270°

技术规格 Mechanical Specifications

Polar rotation	360°
Z stroke	75mm

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