产品概述 Product Overview
The 4-axis MBE manipulator provide the sample translational in X, Y and Z directions and the rotation R1(Polar). Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.
产品亮点 Highlights
● Highest temperature: 1200K (radiation heating ),1500K(E-beam heating)
● Multi-axis: X、Y、Z、R1
● Temperature
stability: 0.1K with PID control
● Options
available
技术规格 Mechanical Specifications
Polar
rotation |
±179° |
X/Y
stroke |
15mm(±7.5mm) |
Z
stroke |
Up to 300 mm |
相关配件 Options
● LN2 cooling module
● E-beam heating
● Shutter
● Heater
switch
● Infrared
thermometer
测试曲线图 Test Curve
Video
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