产品概述 Product Overview

The 4-axis LN MBE manipulator provide the sample translational in X, Y and Z directions and the rotation R1(Polar). LN2 cooling module ensures the lowest temperature of the sample stage can reach 80K. Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.

产品亮点 Highlights

● Lowest temperature：90K

● Highest temperature: 1200K (radiation heating )，1500K(E-beam heating)

● Multi-axis: X、Y、Z、R1

● Temperature stability: 0.1K with PID control

● Options available

技术规格 Mechanical Specifications

Polar rotation	±179°
X/Y stroke	±12.5mm
Z stroke	Up to 300mm

相关配件 Options

● E-beam heating
● Shutter
● Heater switch

● Infrared thermometer

加热测试曲线图 Test Curve

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