产品概述 Product Overview

The 5-axis MBE manipulator can provide the sample translational in X, Y and Z directions, the Polar rotation (R1) and Azimuthal rotation (R3). X、Y、Z、R1 are realized by the XYZ-R1 stage, R3 is realized by the gear transmission structure of the sample stage. Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.

产品亮点 Highlights

● Highest temperature: 1200K (Radiation heating) ; 1500K(E-beam heating)

● Multi-axis: X、Y、Z、R1、R3

● Temperature stability: 0.1K with PID control

● Options available

技术规格 Mechanical Specifications

Polar rotation	±179°
X/Y stroke	±12.5mm
Z stroke	Up to 300 mm
Azimuthal	360°

相关配件 Options

● LN₂ cooling module
● E-beam heating
● Heater switch
● Infrared thermometer

升温测试曲线图 Test Curve

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