产品概述 Product Overview

The 5-axis LN MBE manipulator can provide the sample translational in X, Y and Z directions, the Polar rotation (R1) and Azimuthal rotation (R3). X、Y、Z、R1 are realized by the XYZ-R1 stage, R3 is realized by the gear transmission structure of the sample stage. LN2 cooling module ensure the temperature of sample stage up to 120K, Unique filament heating structure ensures the temperature of sample holder up to 1000K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum. 

产品亮点 Highlights

● Lowest temperature: 120K

● Highest temperature: 1000K (Radiation heating) ; 1200K(E-beam heating)

● Multi-axis: X、Y、Z、R1、R3

● Temperature stability: 0.1K with PID control

● Options available

技术规格 Mechanical Specifications

Polar rotation	±179°
X/Y stroke	25mm(±12.5mm)
Z stroke	Up to 300mm
Azimuthal	360°

相关配件 Options

● E-beam heating
● Heater switch
● Infrared thermometer

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