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HMF-MBE 200 is equipped with different types of evaporation sources, suitable for studying various material systems under strong magnetic fields. It can grow metal, magnetic thin films, and semiconductor heterojunctions, and is suitable for interconnecting multiple in-situ measurement systems. At the same time, the system is easy to operate, with a modular chamber configuration that facilitates daily maintenance and upkeep.
| ● Integrated helium free strong magnetic field superconducting magnet | ● Molecular beam epitaxy growth can be achieved under strong magnetic field conditions at room temperature |
| ● Growth source components：3xDN40CF (growth of ferromagnetic materials under strong magnetic field), 2xDN40CF (growth of conventional metals), 1xDN40CF (RF plasma source) | |
| HMF-MBE-200 | Module Description | Configuration parameter | |
| Growth chamber | Cavity | Material of the cavity | SS316 |
| Cavity Size | 200mm I.D | ||
| Baking temperature | Max.200℃ | ||
| Background vacuum | < 5×10-10 mbar | ||
| Pumping system | 300L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Ionic gauge+Pirani gauge | ||
| Ion pump | Optional | ||
| Sample Holder | Sample size | Flag-type Sample holder | |
| Substrate heating method | Radiant heating | ||
| Substrate heater temperature | 1200K | ||
| Component | Steam source configuration | 6xDN40CF | |
| Independent evaporation source baffle | Pneumatic drive | ||
| QCM | Optional | ||
| Ion Source | Optional | ||
| RGA | Optional | ||
| Superconducting magnet | Magnet type | Dry/GM refrigeration | |
| Magnetic environment | Room temperature chamber | ||
| Inner diameter of cavity | 105mm | ||
| Magnetic field intensity | ±9T | ||
| Magnetic field uniformity | <0.1% | ||
| Rapid injection room | Cavity | Material of the cavity | SS316 |
| Baking temperature | Max.200℃ | ||
| Background vacuum | <5×10-8 mbar | ||
| Pumping system | 80L/s molecular pump +10m3/h mechanical pump | ||
| Vacuum measurement system | Full range gauge | ||
| Component | Sample Parking Platform | 6 or 12 workstations | |
| Sample transfer rod | CF35/600mm | ||
| Manipulator | CF35/150mm | ||
| System integration and control | GUIDE software | Standard configuration | |
| Baking system | Standard configuration | ||
| System bracket | Standard configuration | ||
| Vacuum lighting system | Optional | ||
| Plasma cleaning | Optional | ||
| CCD camera | Optional | ||
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