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Patent Certificate

Technological innovation is the driving force of corporate development. Fermion has always attached great importance to the original accumulation of independent intellectual property rights, and has continuously promoted product upgrades and enhanced the company's core creativity through technological research and development and innovation.
As of the end of January 2024, our company has obtained 151 authorized patents
In addition, Fermion Instruments has obtained 19 invention patents, and a large number of invention patents and utility model patents are being authorized or applied for
  • Plasma cleaning and polishing device for ultra-high vacuum chamber
    Patent Number: ZL2017 1 1236830.4
  • Compact LN2-free 1K cryogenic refrigeration unit for ultra-high vacuum environments
    Patent Number: ZL 2016 1 1154635.2
  • A magnetic transmission mechanism and a vacuum pipeline system using the transmission mechanism
    Patent Number: ZL 2016 1 1011730.7
  • A high brightness ultraviolet light source with integrated cooling device
    Patent Number: ZL 2016 1 0791833.3
  • A vacuum ultraviolet light source device
    Patent Number: ZL 2016 1 0261838.5
  • Vacuum in-situ reaction device
    Patent Number: ZL 2015 1 0761877.7
  • Mechanical transfer arm and vacuum transfer chamber
    Patent Number: ZL 2015 1 0661875.0
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