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This device can perform in-situ exfoliation and stacking of two-dimensional materials in an ultra-high vacuum environment. It consists of components such as an ultra-high vacuum chamber, a four axis sample parking platform, a stacking platform, a dissociation platform (including pressure sensors), a reverse microscope, and RHEED.
| Reverse microscope | |||
| Special concave docking flange design allows the lens to better focus on the surface of the sample | The zoom mechanism is flexible, with manual or electric zoom options available | An open imaging system that can freely integrate automatic focusing DIC、 Building a fully automated machine vision inspection system with functional modules such as polarization and spectral analysis | |
| Ultra high vacuum chamber and bracket | |||
| Ultra high vacuum standard chamber, made of SS316 stainless steel material | Flange ports that meet ultra-high vacuum standards | Standard sample holder, can be integrated onto the sample manipulator | The fixed support structure ensures that the system is not easily shaken and is more secure after the equipment is positioned |
| RHEED(reflection high-energy electron diffraction) | |||
| Composed of a high-energy electron gun and a fluorescent screen (mounted on the opposite window) | Reflect the structural information of the sample surface | Can be used to study crystal growth, adsorption, surface defects, and other aspects | |
| Four axis sample parking platform | |||
| Composed of sample parking platform, two-dimensional translation platform, linear drive, and compact differential rotation feedthrough | 13 flag shaped sample holders can be parked simultaneously | The sample parking space at the top can be used for observing samples with a microscope | Can achieve movement in X, Y, Z, and θ directions |
| Four axis high and low temperature sample Manipulator | |||
| Temperature range of sample stage:110K-600K | Can achieve movement in X, Y, Z, and θ directions | ||
| RHEED screen microscope | |||
| Composed of a microscope, microscope stand, prism, and light shield | 90° Reflective light path | Compact | |
| Manipulator | |||
| Can transfer sample holders between different parking stations | |||
| Dissociation platform | |||
| Composed of a dissociation stage, compact differential rotation,feedthrough and triangular leveling mechanism | Realize horizontal control of single crystal materials on the dissociation stage through a triangular leveling mechanism | Connect the copper braid to the top stacking platform for cold conduction | The dissociation stage is equipped with a built-in pressure sensor |
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