On April 27, 2020, the Demo Phase I system designed and built by Fermi Instruments (Shanghai) Co., Ltd. (Fermi Instruments) completed the acceptance of various indicators within the company and was officially delivered to Professor Alifu's team of the Scientific Research Products Department of Fermi Instruments.
Thin film preparation, vacuum, low temperature, and plasma technology are the four major technical directions of Fermion Instruments. Fermion Instruments integrates its own advantages and independently develops and builds a complete set of Demo systems, including thin film preparation, vacuum interconnection, and analytical measurement, in order to better serve customers and provide more professional technical solutions.
This system platform is a mature product of FERMI INSTRUMENTS, consisting of representative products of FERMI INSTRUMENTS. This delivery is the first phase system, including two modules: ultra-high vacuum thin film growth system and circular sample transfer system.
▲The first phase of the Demo system was successfully delivered
Ultra-high vacuum thin film growth system
The background vacuum of the Cubic chamber of the ultra-high vacuum thin film growth system is better than 5×10-10mbar; it is currently equipped with a high-temperature evaporation source and a mini electron beam evaporation source, which is suitable for the growth of a variety of materials.
The matching sample holders are five-axis high-temperature sample holders and four-axis high-low temperature sample holders, among which:
The maximum working temperature of the five-axis high-temperature sample holder is 1200K (thermal radiation heating) or 1500K (electron beam heating), and the temperature control accuracy is better than 0.1℃, while ensuring the multi-degree-of-freedom movement and position accuracy of the sample stage;
In addition to having the same high-temperature indicators, the four-axis high-low temperature sample holder can be cooled to a minimum temperature of 150K by liquid nitrogen;
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▲Ultra-high thin film vacuum growth system | ▲Multi-degree-of-freedom operation of the sample stage |
Circular sample transfer system RDC820
RDC820 adopts the idea of ultra-high vacuum center. The stainless steel chamber is equipped with 8 docking ports as standard. The robot arm can extend 820mm from any port, and the telescopic ratio is far better than the ordinary sample transfer rod structure. In addition to the rotation and telescopic freedom, the robot arm of RDC820 also has the degree of lifting freedom to adapt to the height difference between different systems; the robot arm can achieve 360-degree flipping with the ballistic module to match the different sample orientations between different systems; by matching the standard Flag Type Sample holder, the robot arm can realize the placement of sample holders through a special mechanism. This circular sample transfer system leaves ample room for expansion to allow for the subsequent connection of more systems with different functions.
▲Circular sample transfer system RDC820
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▲The robotic arm can freely flip 360° | ▲Robotic arm freely retractable |
This is the first time that Fermion Instruments has officially delivered a complete system within the company. It will serve as the company's internal system teaching and training platform and external technology display window. The first phase of the system will be mainly used for thin film preparation, providing customers with professional data required for the evaporation source to be used in the growth of various materials. On this basis, in the future, we will also use the advantages of low temperature and plasma technology to connect with different Fermion instrument products, such as expanding the ultra-high resolution angle-resolved photoelectron energy spectrum measurement system. Fermion Instruments has strong system integration and R&D capabilities. We hope to cooperate with more outstanding scientific researchers at home and abroad to continue to provide more professional technical services and complete solutions.