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Standard Evaporator

Low temperature (LT) and medium temperature (MT) Evaporator adopts Ta wire radiation heating, the maximum working temperature can reach 1100℃ and 1500℃, built-in water cooling and shutter.

Besides standard filament configurations, Hot Lip and Cold Lip filament configurations are also available to meet the specific requirements of the evaporation materials.

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021-6525 3206
Technical Parameter
●  The maximum working temperature of the low-temperature evaporation source can reach 1100℃●  The maximum working temperature of the medium-temperature evaporation source can reach 1500℃●  Program temperature control, minimum temperature fluctuation ≤0.1%
●  Good insulation effect, low power●  Built-in water cooling and baffle●  Optional hot and cold heating wires
●  Customizable length in vacuum, short delivery cycle

Standard
Evaporator		Module DescriptionConfiguration parameters
ModelE38LTE38MTE63LTE63MT
Size
Mounting flangeDN38CFDN63CF
In vacuum length294mm328mm
In vacuum outer diameter35mm62mm
Work distance200-300mm
Crucible
Crucible capacity10cc25cc
Crucible materialAl2O3, PBN, PG, W, Ta, MoAl2O3, PBN
TemperatureThermocoupleKCKC
Operation temperature100-1100℃
300-1500℃300-1100℃300-1500℃
Temperature Stability≤0.1%, Depending on the PID controller
Maximum degassing temperature1200℃1600℃1200℃1600℃
Maximum baking temperature250℃
Product size


Test Data

Power Test

Cu Flux Test

Cu Film Thickness Test

Temperature Stability Test

Label： Ultra high vacuum MBE
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