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Material Deposition Table

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Ta

Time: 2021.11.05Source: View: 961

MaterialSymbol (atomic number)
Melting point(℃)
Density (g/cm³)
Z-Ratio
Saturated vapor pressure temperature (℃)
Recommended evaporation source*
Recommended crucible*
Notes
E-8Torr
E-6 Torr
E-4Torr
TantalumTa(73)
299616.650.26219602240
2590
E38EB/EBV

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