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Material Deposition Table

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Al

Time: 2021.08.25Source: View: 1280
MaterialSymbol (atomic number)
Melting point(℃)
Density (g/cm³)
Z-Ratio
Saturated vapor pressure (℃)
Recommended evaporation source*
Recommended crucible*
Notes
E-8Torr
E-6 Torr
E-4Torr
aluminumAl(13)
660.252.7021.08807972
1200
E38MTCL/E63MTCL
PBN
The cooling rate should be as low as possible, the recommended rate is 1-2℃/s, the filler should not exceed 1/3 of the crucible volume, and the filler should be reduced when the angle increases It is recommended to replace the crucible after each use






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