MBE-800 molecular beam epitaxy system

MBE-800 Manual sample transfer system，By using a magnetic coupling transfer rod, 4-inch samples can be transferred. The robotic arm can travel up to 1200mm, meeting the requirements for substrate transfer between the growth chamber and the pre-processing chamber. At the same time, the robotic arm can provide a movement space of 25mm in the vertical direction, meeting the requirements for substrate retrieval and placement operations. This sample transfer system does not require the use of secondary motion tools, greatly simplifying the substrate transfer steps while reducing costs.
The MBE-800 manual sample transfer system can also connect the rapid injection chamber and the heat treatment chamber through a straight line segment. The vacuum sample transfer car developed by Fermion Instrument can not only achieve free transfer of substrates between the rapid injection chamber and the pretreatment chamber, but also greatly increase the number of samples parked, making the system more suitable for quasi batch production applications. 

MBE-800 Cluster Fully automatic sample transfer system，Integrating different chambers on a circular sample transfer chamber, coupled with a 360 ° continuously rotating robotic arm component, with a maximum stroke of 1350mm, can achieve vacuum transfer of substrates between different chambers. The robotic arm is driven to rotate by a high torque magnetic coupling driver, and precise positioning is achieved by a positioning substrate installed at the front end of the robotic arm. The robotic arm can provide 0-25mm free movement in the vertical direction through linear drive, achieving substrate picking and placing operations.