MBE-600 molecular beam epitaxy system

Can perform 3-inch substrate transfer. Fermion Instrument transforms traditional substrate transfer methods into a fully functional device. This system not only provides horizontal linear motion for substrate transfer, but also offers up to 25 mm of vertical movement space for up and down movement to remove or place substrates. This system does not require the use of secondary motion tools, reducing costs and greatly simplifying substrate transfer technology.

The substrate can be easily transferred to various chambers without compromising the vacuum level of the MBE chamber. Cluster Tool is a mechanical arm component installed on the top or bottom of a UFO, which can rotate continuously 360 °, with the purpose of transferring substrates throughout the MBE system; Paired with a linear drive device, it achieves free movement in the vertical direction of 0-50mm, with the aim of placing and grasping substrates. The end of the robotic arm can be paired with a 3-inch substrate gripping head, with a maximum load capacity of 1kg. The robotic arm is driven by a high torque magnetic coupling driver to rotate to the desired vacuum chamber port, and the positioning substrate is installed on the front end of the robotic arm to detect the process of the robotic arm moving the substrate within the system module.