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2-axis high temperature manipulator

Technical specifications
● Heater material: SIC;● Maximum sample holder temperature: 1200K;● Two degrees of freedom: Z and R1;● Precision temperature control: PID temperature control accuracy can reach ±0.1K;
● Compatible with mask plate (MASK);● Repeat positioning accuracy: 2μm;● Rotation angle: 0°, 90°, 180°, 270°

R1 axial rotation360°
Z travel75mm
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