● Heater material: SIC; | ● Maximum sample holder temperature: 1200K; | ● Two degrees of freedom: Z and R1; | ● Precision temperature control: PID temperature control accuracy can reach ±0.1K; |
● Compatible with mask plate (MASK); | ● Repeat positioning accuracy: 2μm; | ● Rotation angle: 0°, 90°, 180°, 270° |
R1 axial rotation | 360° |
Z travel | 75mm |
After receiving the information, our sales personnel/product engineers will contact you
Some products can be customized according to your needs
Your information will be kept confidential throughout the entire process