Your current location: Home > Products > R&D Instruments > Thin film preparation > PLD Core Components > Sample rack > 2-axis high tem... | ● Heater material: SIC; | ● Maximum sample holder temperature: 1200K; | ● Two degrees of freedom: Z and R1; | ● Precision temperature control: PID temperature control accuracy can reach ±0.1K; |
| ● Compatible with mask plate (MASK); | ● Repeat positioning accuracy: 2μm; | ● Rotation angle: 0°, 90°, 180°, 270° |
| R1 axial rotation | 360° |
| Z travel | 75mm |

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