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The high-precision differential rotary drive improves the accuracy and stiffness of the rotary drive by using cross roller bearings. In addition, it is equipped with a photoelectric encoder, which drives the worm gear through a servo motor and is then closed-loop controlled by the photoelectric encoder to achieve the rotational motion of the component in an ultra-high vacuum environment. It has a rotation angle of ± 175 ° and is suitable for high-precision and high load applications.
| ● Apply to 10-11 mbar ultra high vacuum environment | ● One stage differential achieves ultra-high vacuum performance | ● Baking temperature: 120°C |
| ● Rotation range: ±175° | ● Driven by servo motor | ● Upper end installation flange:CF flange, threaded hole |
| ● Bottom installation flange: CF flange, threaded hole | ● Closed loop | ● Grating ruler resolution: ≤0.0001° |
| ● Can withstand large loads: >2000kg |
| Product Name | High precision differential rotary drive（HDPRF） | |
| Mounting flange | CF150 | |
| Flange size | mm | 203 |
| Inch | 8.0 | |
| Rotation angle | ±175° | |
| A (mm) | 338 | |
| B (mm) | 288 | |
| C (mm) | 104 | |
| D (mm) | 102 | |
| E (mm) | 90 | |
| Drive | Servo motor | |
| Weight (kg) | 29.2 | |
| Model | HDPRF150AP | |
| XY drive | 3040400008 | |
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