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3-inch special high temperature manipulator

Specifications
● Mounting flange: DN 350CF;● Substrate size: 3 inches;● Heater: SiC heater;● K-type thermocouple temperature measurement;● Rotation speed: 0~30 RMP;
● Temperature range: RT-1000℃;● Z-axis travel: 50mm;● Customized length;● Application areas: thin film preparation, pulsed laser deposition, magnetron sputtering
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