Your current location: Home > Products > R&D Instruments > Thin film preparation > Sputtering Core Components > 3-inch special ... | ● Mounting flange: DN 350CF; | ● Substrate size: 3 inches; | ● Heater: SiC heater; | ● K-type thermocouple temperature measurement; | ● Rotation speed: 0~30 RMP; |
| ● Temperature range: RT-1000℃; | ● Z-axis travel: 50mm; | ● Customized length; | ● Application areas: thin film preparation, pulsed laser deposition, magnetron sputtering | |

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