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PLD 300 is a pulsed laser deposition device developed by Fermion Instruments for universities and research institutes. It is used to grow superconducting thin films, ferroelectric materials, thermoelectric materials, piezoelectric materials, and multilayer and heterogeneous films of complex oxides. The system can realize the growth of composite materials with complex chemical compositions. At the same time, process gases such as active or inert and mixed gases can be introduced during the growth process to improve the quality of thin film growth.
PLD 300 | Module Description | Configuration Parameters | |
Growth Chamber | Chamber | Chamber Materials | SS316 |
Chamber size | 300mm I.D. | ||
Baking temperature | Max.200℃ | ||
Background vacuum | < 5×10-10mbar | ||
Exhaust system | 450L/s molecular pump + 10L/s mechanical pump | ||
Vacuum measurement system | Full range gauge + capacitance film gauge | ||
Ion pump/TSP/NEG | Optional | ||
Sample rack | Sample size | 2 inch | |
Substrate heating method | Radiant heating/laser heating | ||
Maximum temperature of substrate heater | 1200℃ | ||
Maximum substrate rotation speed | 30RPM | ||
Target stage | Target size | 6×1 inch or 3×2 inch | |
Rotation mode | Revolution + rotation | ||
Independent target stage baffle | Pneumatic drive | ||
Mass flow meter | Three-way/200sccm | ||
Components | QCM | Standard | |
Differential RHEED | 15KeV-30KeV | ||
Ion Source | Optional | ||
RGA | Optional | ||
Fast Sample Chamber | Cavity | Cavity material | SS316 |
Baking temperature | 120℃ | ||
Background vacuum | < 5×10-8mbar | ||
Exhaust system | 80L/s molecular pump + 10L/s mechanical pump | ||
Vacuum measurement system | Full range gauge | ||
Components | Sample parking table | 3 stations | |
Sample transfer rod | CF35/600mm | ||
Software and hardware integration | GUIDE software | Standard configuration | |
Baking system | Standard configuration | ||
System bracket | Standard | ||
Vacuum lighting system | Standard | ||
Laser | Imported/domestic optional | ||
KSA image analysis system | Optional | ||
Kaufman ion source | Optional | ||
Infrared Thermometer | Optional | ||
PumpCar | Optional | ||
Plasma cleaning | Optional | ||
CCD camera | Optional | ||
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