Your current location: Home > Products > R&D Instruments > Sample processing > Ion/Atom Processing > Liquefied high purity ozone system > Liquefied high ... 
● All-metal sealed ozone liquefaction pool
● No silica gel adsorbent
● Closed-cycle refrigerator with automatic temperature control
● Fast purification speed, preparation time only takes 30 minutes; after 1 hour of purification, it can produce about 4 standard liters of high-purity ozone gas, which can meet the growth needs of most users for more than ten hours
● Compact design, size 400*700*1200mm (height)
● Easy to operate, start and stop
● High-purity ozone application areas: chemical vapor deposition (CVD), atomic layer deposition (ALD), oxide growth, surface treatment, particle cleaning, photoresist removal, ashing, etc.
| —————— Measured saturated vapor pressure data —————— | —————— Stability and continuity of ozone output beam —————— |
 |  |
| —————— Relationship between injection cavity pressure and liquefaction pool temperature —————— | |
 |
After receiving the information, our sales personnel/product engineers will contact you
Some products can be customized according to your needs
Your information will be kept confidential throughout the entire process
中文
021-6525 3206
National Service Hotline