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| ● Liquid helium cooling; | ● Multi-degree of freedom: Up to 6 degrees of freedom; | ● Temperature range: 6K~400K; |
| ● Cooling speed: RT to 10K, <15 minutes; | ● Compatible with liquid nitrogen: <65K operation (with pump) | ● High temperature sample stage (optional electron beam heating); |
| R1 Axial Rotation | 360° (-180°, +180°) |
| R2 Pitch Rotation | 60° (-15°, +45°) |
| R3 In-plane Angular Rotation | 240° (-120°, +120°) |
| X / Y travel | 25mm (±12.5mm) |
| Z travel | Maximum 650mm |
| 4-axis | 5A-axis | 5F-axis | 5.5-axis | 6-axis | ||
| XY travel | ±12.5mm | ±12.5mm | ±12.5mm | ±12.5mm | ±12.5mm | ±12.5mm |
| Z travel | Up to 700mm | Up to 700mm | Up to 700mm | Up to 700mm | Up to 700mm | |
| XYZ drive | Manual/motor | Manual/motor | Manual/motor | Manual/motor | Manual/motor | Manual/motor |
| XYZ accuracy | <0.01mm | <0.01mm | <0.01mm | <0.01mm | <0.01mm | ＜0.01mm |
| R1 range | 360°（-180°，+180°） | 360°（-180°，+180°） | 360°（-180°，+180°） | 360°（-180°，+180°） | 360°（-180°，+180°） | |
| R1 control mode | Manual/motor | Manual/Motor | Manual/Motor | Manual/Motor | Manual/Motor | |
| R1 Control Accuracy | <0.1° | <0.1° | <0.1° | <0.1° | <0.1° | <0.1° |
| R1 reduction ratio | 360:0.2 | 360:0.2 | 360:0.2 | 360:0.2 | 360:0.2 | |
| R2 (Flip) range | —— | —— | 60° (-15°, +45°) | 60° (-15°, +45°) | 60° (-15°, +45°) | |
| R2 driver | —— | —— | Motor | Manual/Motor | Manual/Motor | |
| R2 Accuracy< /strong> | —— | —— | ＜0.1° | ＜1° | ＜0.1 ° | |
| R2 reduction ratio | —— | —— | 360:9 | 360:6 | 360:3 | |
| R3 (Azi) Scope | —— | 240° (-120°, +120°) | —— | 240° (-120°, +120°) | 240° (-120°, +120°) | |
| R3 driver | —— | Manual/Motor | —— | Manual | Manual/Motor | |
| R3 Accuracy< /strong> | —— | ＜0.1° | —— | Manual ＜1° | ＜ 0.1° | |
| R3 reduction ratio | —— | 360:5 | —— | 360:4.5 | 360:4 | |
| Temperature range | ＜4-325K | ＜5-325K | ＜5-325K | ＜6-325K | ＜6-325K | |
| Minimum temperature | ＜4K | ＜5K | ＜5K | ＜ 6K | ＜6K | |
| Control accuracy | ＜0.01K | ＜0.01K | ＜0.01K | ＜0.01K | ＜0.01K | ＜0.01K |
| Cool down time | ＜3 Hour (RT-6K) | ＜4 Hour (RT-6K) | ＜4 Hour (RT-6K) | ＜5 Hour (RT-6K) | ＜6 Hour (RT-6K) |
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