产品概述 Product Overview
Radial Distribution Sample Transfer System is designed as a sample transfer instrument for UHV system by Fermi Instruments.
RDC chamber, a UFO shaped chamber, is made of SS316, UHV compatible.
It connect different systems as one piece and samples can travel freely in UHV
environment and could be measured in-situ.
Please contact Fermi for more information.
规格说明 Specification
|
RDC820 |
RDC520 |
Chamber
OD Size |
700mm |
550mm |
Mounting
Flange of Arm |
CF200 |
CF200 |
Viewable
Flange |
CF150 |
CF100 |
Connecting
Flange |
CF100 |
CF100 |
Rotation
of Transfer Arm |
360°
continuous |
360°
continuous |
Extending
Stroke(from the flange) |
820mm |
520mm |
Extension capability |
up to 8 sub-systems |
up to 6 sub-systems |
Rotation
reproducibility |
<0.1° |
<0.1° |
Linear
reproducibility |
<1mm |
<1mm |
Max.
Bakeout Temperature |
120℃ |
120℃ |
Video
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