Standard Evaporator Current Location: Home > Product Center > Thin Film Fabrication > Component product > Evaporator > Standard Evaporator

产品概述 Product Overview

Standard Effusion Cells of type E38LT and E38MT could reach the maximum operating temperatures of 1100℃ and 1500℃ respectively. The filament with particularly designed cylindrical structure could ensure that the crucible would be heated uniformly, which would also guarantee the thermal stability and long service life. Multilayer-line-contact shielding made of tantalum foil could reduce the irrelevant thermal radiation and thus increase the heating efficiency remarkably, resulting a high operation temperature with sufficiently low power consumption. The built-in water-cooling system could greatly decrease the temperature for parts other than the high temperature heating sector, which could not only suppress the outgassing of structure components, but also improve the temperature measurement accuracy.
Besides standard filament configurations, Hot Lip and Cold Lip filament configurations are also available to meet the specific requirements of the evaporation materials.


规格说明 Specification

● Heating System: Radiation heating, Tantalum
● Oxide MBE compatible
● Temperature Stability: ≤0.1℃, depending on the PID controller
● UHV compatible down to 10-11mbar
● Internal Water Cooling
● Shutter: Optional (Manual / Pneumatic)

Mounting Flange Crucible Size Working Temperature Degas Temperature Thermocouple Stability Part Number
NW38CF(O.D. 2.75”)
10 cc
100~1100℃ 1200℃ K ±0.1℃
E38LT
300~1500℃ 1600℃ C E38MT


测试曲线图 Test Curve

——————    Testing Curve    —————— ——————     Cu Flux Test    ——————


——————     Cu Film Thickness Test    ——————— ——————     Temperature Stability Test    ——————



产品尺寸 Dimension Drawing





Video


Related Downloads

    No Download
Tags: evaporators