产品概述 Product Overview

Effusion Cells with different configurations have proven their capability in evaporating most elements in a controllable and stable manner. However, there are certain limits on the effusion cells with the wired filament design, for which the highest temperature one could achieve is around 2000 ℃. This is still below the evaporating point of many refractory metals such as Ta, Mo, etc.
E-Beam Evaporators pushed the highest working temperature to around 3000 ℃ by electron bombardment from the surrounding filament to a rod form material or crucibles.
The heated zone is enclosed in a water-cooled copper shroud which keeps the degassing at a very low level. By tuning the input power from 0 to 300W, flux control from <0.1Å/min to >50Å/min can be achieved for many materials. A 50mm travel linear translator is equipped with the evaporator to support the movement of rod material and guarantee the rod tip always in the optimized position.

规格说明 Specification

● Part Number：E38EB

● Filament Current: 4.5 A (Max. 5 A)

● High Voltage (Max): 2 KV
● Emission Current: 200 mA (Max. 300 mA)
● PID control with flux feedback
● Source (optional): Rod (Diameter: 2.5 mm ~ 6 mm; feed length: 50mm) / Crucible (0.25 cc)
● Flange Size: DN38CF (O.D. 2.75”)
● Bakeout Temperature: 150 ℃ 
● Internal Water Cooling
● Shutter: Optional (Manual/Pneumatic)

测试曲线图 Test Curve

——————   Fe Flux Test    ——————	——————    Fe Flux Stibility Test    ——————
——————    Fe Film Thickness Test    ——————	——————    lon Current vs Flux Test    ——————
——————    Nb Flux Test    ——————	——————    Nb Flux Stibility Test    ——————

产品尺寸 Dimension Drawing

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