产品概述 Product Overview
● Mounting
Flange: DN 350CF
● Substrate
size: 3 inch
● Heater:
Silicon Carbide(SiC)
● Sensor:
Thermocouple type K
● Temperature
range: RT-1000℃
● Z-axis
travel: 50mm
● Customized insertion length
● Application area:Thermal Evaporation, Pulsed Laser Deposition, Magnetron Sputtering
相关配件 Options
● Manual/
pneumatic shutter
● Water
jacket
● Sensor:
Thermocouple type K or C
● Z-axis
travel: up to 250mm, manual/motor control
● DPRF:
±180°, manual/motor control
Video
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