产品概述 Product Overview

Compact XYZ stage, with a compact structure, can provide precise motion and manipulation of samples inside UHV environments. The X/Y direction is controlled by micrometers, while the Z direction is driven by lead screw, which makes the operation more stable. Welded stainless steel bellows is used to allow the CF35 moving flange to travel within a limited range. There are optional bottom mounting flanges, NW35CF or NW63CF flanges.

规格说明 Specification

● Working Pressure：10^-11 mbar~1 bar
● Manual Actuator
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Micrometer with 10um Resolution
● Z-motion scale in 1mm increment
● Top mounting flange: CF35, tapped hole

● Bottom mounting flange: CF63, clear hole

Flange OD		XY Movement	Z Movement	A Compressed	A Extended	Weight（Kg)	Part Number
mm	inch	mm
70	2.75	±12.5	75	165	240	10.2	SXYZ63Z75
			100	165	265	10.5	SXYZ63Z100
			150	165	315	10.9	SXYZ63Z150

产品尺寸 Dimension Drawing

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