产品概述 Product Overview

XY Stage is one easy option for users who requires precise motion, true UHV performance, rugged construction which allows mounting in any orientation.  There are two parallel flanges, one to remain fixed while the other to provide the movement. The device works by adjusting the position of the travelling flange in relation to the fixed system mounting flange. Position of the travelling flange is controlled through two micrometers.

The welded bellow allows the flanges to accommodate the required motion while ensuring an all-metal vacuum enclosure.

规格说明 Specification

● Working Pressure: 10^-11 mbar~1 bar
● Manual Actuator
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Micrometer with 10μm Resolution
● Mounting flange on both sides: CF35, tapped hole

Flange OD		XY Movement	A	B	C	D	E	Weight（Kg)	Part Number
mm	inch	mm
70	2.75	±7	229	271	38	93	67	4.3	XY35

产品尺寸 Dimension Drawing

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