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产品概述 Product Overview
Medium
XYZ stage, which is of precision and operability, provide X,Y and Z movement .
X/Y direction adopts crossed roller bearing and ball screw structure, which
make the stage strong and compact in structure. Meanwhile the Z direction adopts the combination structure of
plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please
contact for more information.
规格说明 Specification
● Working
Pressure：10-11mbar~1 bar
● Bakeable
to 120℃
● Welded
Bellows Seal with SS 316
● Clear
Bore up to 65mm
● Top
mounting flange: CF flange, clear hole or tapped hole
● Bottom
mounting flange: CF flange, tapped hole
● X/Y driver: Step motor with 10μm or micrometer with10μm
● Z driver: Step motor with 10μm + handwheel
● minimum flange to flange(compressed) distance is 298.5mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch |
mm |
|
| 114 | 4.5 | 114 | 4.5 | ±7.5 | Up to 200 |
产品尺寸 Dimension Drawing
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