产品概述 Product Overview
Based
on Standard LTM series, Linear Translator with Port Aligner integrates an port
aligner that allows the moving flange to be tilted ±3° for final alignment. It
is typically used on beamlines to align diagnostics or for ion/sputter source
alignment.
Adjustment is actuated via three threaded support shafts. All flanges in the
series are supplied with tapped bolt holes on the base flange as standard.
Standard version comes with manual actuator and if you need motor driven,
please contact Fermi.
规格说明 Specification
● Working Pressure: 10-11mbar~1bar
● Bakeable to 150°C
● Welded Bellows Seal with SS 316
● Tapped Flanges on Both Sides
● Angular tilt: ±3°
● Etched Scale in 1mm Increments
Flange OD | Axial Adjustments | A Extended | A Compressed | C | Weight(Kg) | Part Number | |
mm | inch |
毫米 |
|||||
70 | 2.75 | 75 | 163 | 88 | 38 | 2.7 | LPA35L75M |
100 | 197 | 97 | 38 | 5.0 | LPA35L100M | ||
150 | 257 | 107 | 38 | 7.3 | LPA35L150M |
产品尺寸 Dimension Drawing
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